Theoretical Study of the Spatial Resolution of X-ray Microanalysis in Analytical Electron Microscopy
نویسندگان
چکیده
The spatial resolution of X-ray microanalysis has been investigated by Monte Carlo calculatio~s, including knock-on secondary electron production. The results for AuMa in a lOOOA thin Au film at 100 keV showed an appreciable difference from the ones without knock-out events. Also calculations have been done with the Mott cross-section instead of the screened Rutherford cross-section for elastic scattering. A significant difference was found in the results among the three models.
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